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Bộ điều khiển lưu lượng Brooks Instrument Việt Nam
Models GF40
Multiple gases in one device equals maximum process flexibility and productivity. The GF40 Series elastomer sealed mass flow controllers and meters with Brooks Instrument’s exclusive MultiFlo™ technology provide the perfect choice for systems, processes and facilities that use a variety of gases, change gas types frequently or need to re-range while preserving gas measurement and control accuracy. It enables a new level of process flexibility combined with unprecedented flow measurement and control performance.
Features
Programmable multi-gas/multi-range capabilities
Brooks® MultiFlo™ gas database contains thousands of native gas runs to establish correction functions
Sub-1 second flow response time and accuracy of 1% set point for demanding applications
Well suited for a variety of gases
Fast response, Hastelloy sensor
Easily accessible diagnostic service port is independent of tool communication
Multi-protocol communication options include DeviceNet™, EtherCAT®, Profibus® and RS-485 analog interface
Benefits
MultiFlo™ technology enables new gas calibrations and full-scale ranges without removing the MFC from the gas line, maximizing process uptime
MultiFlo™ programming is simple and user-friendly; new gas can be selected in under 60 seconds
OEMs and large end users can greatly reduce the number of gas and range-specific controllers they inventory
Excellent process gas accuracy backed by superior metrology systems and calibration based on global standards
Corrosion-resistant sensor provides unmatched long-term stability ensuring maximum yield and throughput
User-accessible service port simplifies troubleshooting and diagnostic tasks
Variety of elastomer seals provide cost performance flexibility across range of applications
Multi-protocol communication interface supports integration into existing systems
Applications
Solar cell chemical vapor deposition systems
Life sciences bioreactors
Vacuum processes
Nanotechnology/MEMS fabrication
Plasma, glass and web coating systems
Excellent option for manifold/gas delivery systems
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